Unibond(R) SOI wafers for ultra-thin films applications.
| Autor: | Maleville, C., Neyret, E., Ecarnot, L., Arene, E., Barge, T., Auberton, A.J. |
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| Zdroj: | 2001 IEEE International SOI Conference. Proceedings (Cat. No.01CH37207); 2001, p155-156, 2p |
| Databáze: | Complementary Index |
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