Fabrication of MEMS diaphragm transducer array based on epitaxial PZT thin film for 2-D hydrophone application.

Autor: Okada, N., Higuchi, K., Kobayashi, K., Ito, M., Takabe, M., Otonari, M., Kanja, I., Akai, D., Sawada, K., Ishida, M.
Zdroj: 2008 IEEE Ultrasonics Symposium; 2008, p1781-1784, 4p
Databáze: Complementary Index