Fabrication of MEMS diaphragm transducer array based on epitaxial PZT thin film for 2-D hydrophone application.
Autor: | Okada, N., Higuchi, K., Kobayashi, K., Ito, M., Takabe, M., Otonari, M., Kanja, I., Akai, D., Sawada, K., Ishida, M. |
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Zdroj: | 2008 IEEE Ultrasonics Symposium; 2008, p1781-1784, 4p |
Databáze: | Complementary Index |
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