Evaluation of Ultra Thin Body Si-On-ONO (UTB SOONO) transistors using ultra thin spacer technology.

Autor: Hyun Jun Bae, Sung Hwan Kim, Sung In Hong, Yong Lack Choi, Ho Ju Song, Chang Woo Oh, Dong-Won Kim, Donggun Park, KyungSeok Oh, Won-Seong Lee
Zdroj: 2008 IEEE International Conference on Integrated Circuit Design & Technology & Tutorial; 2008, p5-8, 4p
Databáze: Complementary Index