CMOS-compatible aligned fusion wafer bonding.
| Autor: | Dragoi, V., Mittendorfer, G., Flotgen, C., Dussault, D., Wagenleitner, T. |
|---|---|
| Zdroj: | 2011 International Semiconductor Conference (CAS); 2011, p141-144, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Dragoi, V., Mittendorfer, G., Flotgen, C., Dussault, D., Wagenleitner, T. |
|---|---|
| Zdroj: | 2011 International Semiconductor Conference (CAS); 2011, p141-144, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|