An ultrasonic MEMS particle separator with thick film piezoelectric actuation.
Autor: | Hill, M., Townsend, R.J., Harris, N.R., White, N.M., Beeby, S.P., Jiexiong Ding |
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Zdroj: | IEEE Ultrasonics Symposium, 2005; 2005, p1160-1163, 4p |
Databáze: | Complementary Index |
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