Influences of various dielectrics materials on p++ silicon diaphragm.
| Autor: | Junmiao Wu, Deshu Zou, Guo Gao, Lan Li, Nanhui Niu, Guangdi Shen |
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| Zdroj: | 2001 6th International Conference on Solid-State & Integrated Circuit Technology. Proceedings (Cat. No.01EX443); 2001, p823-823, 1p |
| Databáze: | Complementary Index |
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