Protruding microgripper with force amplification and parallel jaw motion for in-situ sample manipulation in SEM and FIB-machines.
| Autor: | Krijnen, G., Haanstra, R., Potters, E., Berenschot, J.W., von Harrach, S., Elwenspoek, M. |
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| Zdroj: | TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664); 2003, p268-268, 1p |
| Databáze: | Complementary Index |
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