Advanced in-line process control on sidewall striation of deep trench etching.
| Autor: | Hung-Wen Chiou, Tso, S., Tings Wang |
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| Zdroj: | Proceedings 7th International Conference on Solid-State & Integrated Circuits Technology, 2004; 2004, p567-567, 1p |
| Databáze: | Complementary Index |
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