Study on an effect of nitrogenation on microstructure properties of hydrogenated amorphous carbon films.
| Autor: | Rong Xingfu, Qin Zhiyu |
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| Zdroj: | Proceedings of the 6th International Conference on Properties & Applications of Dielectric Materials (Cat. No.00CH36347); 2000, p728-728, 1p |
| Databáze: | Complementary Index |
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