A new approach to spatially controllable CVD.
| Autor: | Jae-Ouk Choo, Adomaitis, R.A., Rubloff, G.W., Henn-Lecordier, L., Yuhong Cai |
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| Zdroj: | Proceedings of the 2004 American Control Conference; 2004, p287-287, 1p |
| Databáze: | Complementary Index |
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