Design issues in gas cluster ion beamlines.
| Autor: | Mack, M.E., Becker, R., Gwinn, M., Swenson, D.R., Torti, R.P., Roby, R. |
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| Zdroj: | Proceedings of the 14th International Conference on Ion Implantation Technology, 2002; 2002, p665-668, 4p |
| Databáze: | Complementary Index |
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