Introduction of the new high voltage, engineering (HVE) accelerator for high energy/high current ion implantation.
| Autor: | Koudijs, R., Gottdang, A., Mous, D.J.W. |
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| Zdroj: | Proceedings of the 14th International Conference on Ion Implantation Technology, 2002; 2002, p498-500, 3p |
| Databáze: | Complementary Index |
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