Precision halo control with antimony and indium on Axcelis medium current ion implanters.
| Autor: | Luckman, G., Harris, M., Rathmell, R.D., Kopalidis, P., Ray, A.M., Sato, F., Sano, M. |
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| Zdroj: | Proceedings of the 14th International Conference on Ion Implantation Technology, 2002; 2002, p279-282, 4p |
| Databáze: | Complementary Index |
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