Plasma doping junction depth measurement using Therma-Probe system.
| Autor: | Bon-Woong Koo, Ziwei Fang, Bakshi, M., Nicolaides, L., Cherekdjian, S. |
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| Zdroj: | Proceedings of the 14th International Conference on Ion Implantation Technology, 2002; 2002, p229-232, 4p |
| Databáze: | Complementary Index |
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