Beam angle control on the VIISta 80 ion implanter.
| Autor: | Campbell, C., Cummings, J., Lindberg, R., Olson, J.C., Radovanov, S.B., Smatlak, D.L. |
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| Zdroj: | Proceedings of the 14th International Conference on Ion Implantation Technology, 2002; 2002, p193-196, 4p |
| Databáze: | Complementary Index |
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