Charge exchange and neutral transport contributions to energy contamination in decel mode, sub-keV ion implantation.

Autor: Armour, D.G., van den Berg, J.A., Wostenholm, G., Al-Bayati, A.H., Murrell, A., Goldberg, R.D., Collart, E.H.J.
Zdroj: Proceedings of the 14th International Conference on Ion Implantation Technology, 2002; 2002, p181-184, 4p
Databáze: Complementary Index