Charge exchange and neutral transport contributions to energy contamination in decel mode, sub-keV ion implantation.
Autor: | Armour, D.G., van den Berg, J.A., Wostenholm, G., Al-Bayati, A.H., Murrell, A., Goldberg, R.D., Collart, E.H.J. |
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Zdroj: | Proceedings of the 14th International Conference on Ion Implantation Technology, 2002; 2002, p181-184, 4p |
Databáze: | Complementary Index |
Externí odkaz: |