High-Q MEMS for wireless integrated circuits.
| Autor: | Lubecke, V.M., Barber, B.P., Fetter, L.A. |
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| Zdroj: | Proceedings of Papers 5th International Conference on Telecommunications in Modern Satellite, Cable & Broadcasting Service. TELSIKS 2001 (Cat. No.01EX517); 2001, p203-203, 1p |
| Databáze: | Complementary Index |
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