Fabrication of Periodic Nanostructure in Nanoimprint Process.
Autor: | Fuh-Yu Chang, Hung-Yi Lin, Chun-Hway Hsueh, Shuo-Hung Chang, Tung-Chuan Wu |
---|---|
Zdroj: | 2006 Sixth IEEE Conference on Nanotechnology; 2006, p580-583, 4p |
Databáze: | Complementary Index |
Externí odkaz: |