Fabrication of Periodic Nanostructure in Nanoimprint Process.

Autor: Fuh-Yu Chang, Hung-Yi Lin, Chun-Hway Hsueh, Shuo-Hung Chang, Tung-Chuan Wu
Zdroj: 2006 Sixth IEEE Conference on Nanotechnology; 2006, p580-583, 4p
Databáze: Complementary Index