Thin film diffusion barrier formation in PDMS microcavities.
| Autor: | Riaz, A., Gandhiraman, R.P., Dimov, I.K., Basabe-Desmonts, L., Ricco, A.J., Ducree, J., Daniels, S., Lee, L.P. |
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| Zdroj: | TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators & Microsystems Conference; 2009, p1051-1054, 4p |
| Databáze: | Complementary Index |
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