Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor.

Autor: Goetz, M., Messner, S., Ashauer, M., Zengerle, R.
Zdroj: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators & Microsystems Conference; 2009, p1261-1264, 4p
Databáze: Complementary Index