Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensor.
Autor: | Goetz, M., Messner, S., Ashauer, M., Zengerle, R. |
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Zdroj: | TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators & Microsystems Conference; 2009, p1261-1264, 4p |
Databáze: | Complementary Index |
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