Improved performance of large stroke comb-drive actuators by using a stepped finger shape.
| Autor: | Engelen, J.B.C., Lantz, M.A., Rothuizen, H.E., Abelmann, L., Elwenspoek, M.C. |
|---|---|
| Zdroj: | TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators & Microsystems Conference; 2009, p1762-1765, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|