A comprehensive study for dielectric charging process in silicon nitride films for RF MEMS switches using Kelvin Probe Microscopy.
| Autor: | Zaghloul, U., Belarni, A., Coccetti, F., Papaioannou, G.J., Bouscayrol, L., Pons, P., Plana, R. |
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| Zdroj: | TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators & Microsystems Conference; 2009, p789-793, 5p |
| Databáze: | Complementary Index |
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