Investigation of plasma irradiation spectra at the diamond like carbon films deposition.
| Autor: | Panosyan, Z.R., Pern, F.-J., Touryan, K.J., Darbasyan, A.T., Meliksetyan, A.V., Voskanyan, S.S., Yengibaryan, Y.V., Voskanyan, A.S., Meliksetyan, V.A. |
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| Zdroj: | 33rd IEEE International Conference on Plasma Science, 2006. ICOPS 2006. IEEE Conference Record - Abstracts; 2006, p221-221, 1p |
| Databáze: | Complementary Index |
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