Can nanoindentation help to determine the local mechanical properties of microelectronic materials? a state-of-the-art review.
| Autor: | Albrecht, H.-J., Hannach, T., Hase, A., Juritza, A., Muller, K., Muller, W.H. |
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| Zdroj: | Proceedings of 6th Electronics Packaging Technology Conference (EPTC 2004) (IEEE Cat. No.04EX971); 2004, p462-467, 6p |
| Databáze: | Complementary Index |
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