Low-temperature CMOS-compatible 3D-integration of monocrystalline-silicon based PZT RF MEMS switch actuators on rf substrates.
| Autor: | Saharil, F., Wright, R.V., Rantakari, P., Kirby, P.B., Vaha-Heikkila, T., Niklaus, F., Stemme, G., Oberhammer, J. |
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| Zdroj: | 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS); 2010, p47-50, 4p |
| Databáze: | Complementary Index |
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