Optimized comb drive finger shape for shock-resistant actuation.
| Autor: | Engelen, J.B.C., Abelmann, L., Elwenspoek, M.C. |
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| Zdroj: | 2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS); 2010, p1147-1150, 4p |
| Databáze: | Complementary Index |
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