Extraordinary low transmission of a metamaterial for application in lithography.
Autor: | Dobmann, S., Ploss, D., Reibold, D., Erdmann, A., Peschel, U. |
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Zdroj: | 2010 Conference on Lasers & Electro-Optics (CLEO) & Quantum Electronics & Laser Science Conference (QELS); 2010, p1-2, 2p |
Databáze: | Complementary Index |
Externí odkaz: |