Flexibly-Shaped-Pulse flash lamp annealing with assisted temperature control (FSP-FLAplus) to realize a wide range of annealing conditions.
| Autor: | Kato, S., Onizawa, T., Aoyama, T., Ikeda, K., Ohji, Y. |
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| Zdroj: | 2010 International Workshop on Junction Technology (IWJT); 2010, p1-4, 4p |
| Databáze: | Complementary Index |
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