Schottky barrier height modulation with Aluminum segregation and pulsed laser anneal: A route for contact resistance reduction.
| Autor: | Shao-Ming Koh, Chee-Mang Ng, Pan Liu, Zhi-Qiang Mo, Xincai Wang, Hongyu Zheng, Zhi-Yong Zhao, Variam, N., Henry, T., Erokhin, Yu., Samudra, G.S., Yee-Chia Yeo |
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| Zdroj: | 2010 International Workshop on Junction Technology (IWJT); 2010, p1-4, 4p |
| Databáze: | Complementary Index |
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