Improvement of productivity by cluster ion implanter: CLARIS.
| Autor: | Tanjyo, M., Hamamoto, N., Umisedo, S., Koga, Y., Une, H., Maehara, N., Kawamura, Y., Hashino, Y., Nakashima, Y., Hashimoto, M., Nagayama, T., Onoda, H., Nagai, N., Horsky, T.N., Hahto, S.K., Jacobson, D.C. |
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| Zdroj: | 2010 International Workshop on Junction Technology (IWJT); 2010, p1-4, 4p |
| Databáze: | Complementary Index |
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