Laser thermal annealed SSR well prior to epi-channel growth (LASPE) for 70 nm nFETS.
| Autor: | Jung-Ho Lee, Jeongyoub Lee, Somit Talwar, Yun Wang, Daehee Weon, Seungho Hahn, Changyong Kang, Taeeun Hong, Younggwan Kim, Haewang Lee, Seokkiu Lee, Jaesung Roh, Daegwan Kang, Jinwon Park |
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| Zdroj: | International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138); 2000, p441-444, 4p |
| Databáze: | Complementary Index |
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