Dynamic analysis of structure of a piezoelectric MEMS micro-mirror actuator: Effects of chip anisotropy and residual stress.
| Autor: | Matin, A., Akai, D., Ozaki, K., Kawazu, N., Hanebuchi, M., Sawada, K., Ishida, M. |
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| Zdroj: | 11th Electronics Packaging Technology Conference, 2009. EPTC '09; 2009, p416-421, 6p |
| Databáze: | Complementary Index |
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