Half cut stress concentration (HCSC) region design on MEMS piezoresistive cantilever for sensitivity enhancement.
| Autor: | Firdaus, S.M., Azid, I.A., Sidek, O., Ibrahim, K., Magdy Hussien |
|---|---|
| Zdroj: | 2008 33rd IEEE/CPMT International Electronic Manufacturing Technology Symposium (IEMT); 2008, p1-6, 6p |
| Databáze: | Complementary Index |
| Externí odkaz: |
|