Determination of the line edge roughness specification for 34 nm devices.
| Autor: | Linton, T., Chandhok, M., Rice, B.J., Schrom, G. |
|---|---|
| Zdroj: | Digest. International Electron Devices Meeting; 2002, p303-306, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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| Autor: | Linton, T., Chandhok, M., Rice, B.J., Schrom, G. |
|---|---|
| Zdroj: | Digest. International Electron Devices Meeting; 2002, p303-306, 4p |
| Databáze: | Complementary Index |
| Externí odkaz: |
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