A comparative 3D simulation approach with extensive experimental Vt/Avt data and analysis of LER/RDF/reliability of CMOS SRAMs at 40-nm node and beyond.

Autor: Okada, T., Yoshimura, H., Aikawa, H., Sengoku, M., Fujii, O., Oyamatsu, H.
Zdroj: 2010 International Conference on Simulation of Semiconductor Processes & Devices (SISPAD); 2010, p121-124, 4p
Databáze: Complementary Index