Direct bonding for silicon photonics.
Autor: | Augendre, E., Fedeli, J.-M., Bordel, D., Ben Bakir, B., Kopp, C., Grenouillet, L., Hartmann, J.-M., Harduin, J., Philippe, P., Olivier, N., Fournier, M., Zussy, M., Lefebvre, K., Sturm, J., Di Cioccio, L., Fulbert, L., Clavelier, L. |
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Zdroj: | 2010 Photonics Global Conference (PGC); 2010, p1-5, 5p |
Databáze: | Complementary Index |
Externí odkaz: |