Introduction of infrared spectroscopic ellipsometry in a semiconductor production environment.
| Autor: | Weidner, P., Mantz, U., Guittet, P.Y., Wienhold, R., Rimane, M., Stehle, J.-L., Boher, P., Bucchia, M. |
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| Zdroj: | Advanced Semiconductor Manufacturing Conference & Workshop, 2003 IEEEI/SEMI; 2003, p244-249, 6p |
| Databáze: | Complementary Index |
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