BEOL parametric variation control with FDC data.
| Autor: | Matsuhashi, Hideki, Bai, Jenny, Xie, Weldom, Fernandez, Patrick, Ngo, Luong, Huron, Gilles, Herndon, Michael, Besnard, Jerome, Williamson, Mike, Graves, Spencer, Akiya, Nobuchika, Yu, Michael, Jensen, Jim |
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| Zdroj: | 2008 International Symposium on Semiconductor Manufacturing (ISSM); 2008, p291-293, 3p |
| Databáze: | Complementary Index |
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