ELFR experiment test verifying anomaly of nano-DRAM products in W-plug process.

Autor: Chiao-Lo Chiang, Mu-Chun Wang, Yu-Min Chung, Chung-Ming Chu, Shou-Kong Fan, Chin-Chia Kuo, I-Shan Yen
Zdroj: 2010 International Symposium on Next-Generation Electronics (ISNE); 2010, p250-253, 4p
Databáze: Complementary Index