Design and fabrication of a MEMS scanning mirror with and without comb offset.
| Autor: | Yick Chuen Chan, Chun Cheong Wong, Congshun Wang, Wei Ma, Ho-Yin Chan, Shoulung Chen, Hon Lung Cheung, Lee, F.C.S., Chen-Jung Tsai |
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| Zdroj: | 2010 5th IEEE International Conference on Nano/Micro Engineered & Molecular Systems (NEMS); 2010, p186-190, 5p |
| Databáze: | Complementary Index |
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