Ultra-thin titanium nitride film epitaxy with hyperthermal titanium ions.
| Autor: | Gerlach, J.W., Hoche, T., Neumann, L., Rauschenbach, B. |
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| Zdroj: | 2009 9th IEEE Conference on Nanotechnology (IEEE-NANO); 2009, p571-574, 4p |
| Databáze: | Complementary Index |
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