Study of sub-melt laser damage annealing using Therma-Probe.
| Autor: | Rosseel, E., Bogdanowicz, J., Clarysse, T., Vandervorst, W., Salnik, A., Sang-Hyun Han, Nicolaides, L. |
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| Zdroj: | 2009 17th International Conference on Advanced Thermal Processing of Semiconductors; 2009, p1-4, 4p |
| Databáze: | Complementary Index |
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