Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study.
| Autor: | Fei Wang, Petersen, D.H., Osterberg, F.W., Hansen, O. |
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| Zdroj: | 2009 17th International Conference on Advanced Thermal Processing of Semiconductors; 2009, p1-6, 6p |
| Databáze: | Complementary Index |
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