Resolution and sensitivity enhancements of scanning optical microscopy techniques for integrated circuit failure analysis.
| Autor: | Phang, J.C.H., Goh, S.H., Quah, A.C.T., Chua, C.M., Koh, L.S., Tan, S.H., Chua, W.P. |
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| Zdroj: | 2009 16th IEEE International Symposium on the Physical & Failure Analysis of Integrated Circuits; 2009, p11-18, 8p |
| Databáze: | Complementary Index |
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