Assembly of micro mirrors on SOI wafers using SU-8 mechanisms and one-push operation.
| Autor: | Yi Chiu, Wei-Zhi Huang, Jhong-Wei Wu, Jin-Chern Chiou, Shieh, H.-P.D. |
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| Zdroj: | 2008 IEEE/LEOS International Conference on Optical MEMs & Nanophotonics; 2008, p110-111, 2p |
| Databáze: | Complementary Index |
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