Low-K/Cu CMOS logic based SoC technology for 10 Gb transceiver with 115 GHz fT, 80 GHz fMAX RF CMOS, high-Q MiM capacitor and spiral Cu inductor.

Autor: Guo, J.C., Lien, W.Y., Hung, M.C., Liu, C.C., Chen, C.W., Wu, C.M., Sun, Y.C., Ping Yang
Zdroj: 2003 Symposium on VLSI Technology. Digest of Technical Papers (IEEE Cat. No.03CH37407); 2003, p39-40, 2p
Databáze: Complementary Index