Design and fabrication of electromagnetic micromirror with bulk silicon mirror plate and aluminum spring.
| Autor: | Chang-Hyeon Ji, Yong-Kweon Kim, Bum-Kyoo Choi |
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| Zdroj: | 2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399); 2000, p97-98, 2p |
| Databáze: | Complementary Index |
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