Model-based temperature control of heated plates.
| Autor: | Ebert, J.L., van der Linden, G.W., de Roover, D., Porter, L.L., Kosut, R.L., Emami-Naeini, A. |
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| Zdroj: | 18th International Conference on Advanced Thermal Processing of Semiconductors (RTP), 2010; 2010, p54-60, 7p |
| Databáze: | Complementary Index |
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