Implementation of MIMO R2R control regulation on furnaces processes.
| Autor: | Richard, B., Roussy, A., Brun, L., Pompier, D., Alegret, C., Pinaton, J. |
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| Zdroj: | Advanced Semiconductor Manufacturing Conference (ASMC), 2010 IEEE/SEMI; 2010, p143-148, 6p |
| Databáze: | Complementary Index |
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